637 13 2014 3 10890 document 2014 VasePaperData.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet 6f0384e395acc1c8637ee72cc2503d2f MD5 151930 2018-07-09 09:22:24 https://researchdata.gla.ac.uk/637/1/VasePaperData.xlsx 637 1 1 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet Spreadsheet en public cc_by_4

VasePaperData.xlsx

data 2015 3 10892 document 2015 optical constants_NbN_NbTiN_MoSi.xlsx application/vnd.openxmlformats-officedocument.spreadsheetml.sheet da68e0fcf084d3000ff5b90e36d0663c MD5 26893 2018-07-09 09:22:30 https://researchdata.gla.ac.uk/637/2/optical%20constants_NbN_NbTiN_MoSi.xlsx 637 2 2 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet Spreadsheet en public cc_by_4

optical constants_NbN_NbTiN_MoSi.xlsx

data 2016 3 10894 document 2016 Optical constants_TiN.XLSX application/vnd.openxmlformats-officedocument.spreadsheetml.sheet f1ac006ba603ababf93e52712a955cb8 MD5 52466 2018-07-09 09:22:35 https://researchdata.gla.ac.uk/637/3/Optical%20constants_TiN.XLSX 637 3 3 application/vnd.openxmlformats-officedocument.spreadsheetml.sheet Spreadsheet en public cc_by_4

Optical constants_TiN.XLSX

data archive 32960 disk0/00/00/06/37 2019-11-25 10:29:37 2019-11-25 10:30:27 2019-11-25 10:29:37 data_collection show Hadfield Robert 29457 0000-0002-8084-4187 Thayne Iain 6101 Morozov Dmitry 38339 0000-0003-4018-4054 Heath Robert 33281 Banerjee Archan 41606 Nasti Umberto 39748 Hemakumara Dilini 35551 glaresearchdata:2019-11-25-637 pub 30305000 There is a growing interest in refractory metal thin films for a range of emerging nanophotonic applications including high temperature plasmonic structures and infrared superconducting single photon detectors. We present a detailed comparison of optical properties for key representative materials in this class (NbN, NbTiN, TiN and MoSi) with texture varying from crystalline to amorphous. NbN, NbTiN and MoSi have been grown in an ultra-high vacuum sputter deposition system. Two different techniques (sputtering and atomic layer deposition) have been employed to deposit TiN. We have carried out variable angle ellipsometric measurements of optical properties from ultraviolet to mid infrared wavelengths. We compare with high resolution transmission electron microscopy analysis of microstructure. Sputter deposited TiN and MoSi have shown the highest optical absorption in the infrared wavelengths relative to NbN, NbTiN or ALD deposited TiN. We have also modelled the performance of a semi-infinite metal air interface as a plasmonic structure with the above mentioned refractory metal based thin films as the plasmonic components. This study has implications in the design of next generation superconducting nanowire single photon detector or plasmonic nanostructure based devices. 2019-11-25 published University of Glasgow 10.5525/gla.researchdata.637 Spreadsheet University of Glasgow 66723 19 UK Quantum Technology Hub in Enhanced Quantum Imaging Miles Padgett Engineering and Physical Sciences Research Council (EPSRC) EP/M01326X/1 S&E P&A - PHYSICS & ASTRONOMY 64596 1 Integrated Photonic Quantum technologies Robert Hadfield Engineering and Physical Sciences Research Council (EPSRC) EP/L024020/1 ENG - ENGINEERING ELECTRONICS & NANO ENG 67331 1 IRIS - Infrared imaging and sensing: the single photon Robert Hadfield European Research Council (ERC) 648604 ENG - ENGINEERING ELECTRONICS & NANO ENG FALSE English 2029-11-25 R FALSE FALSE http://eprints.gla.ac.uk/id/eprint/164939