De-identified raw responses from a between-subjects study comparing three immersive VR training modalities (human-mediated Livestream VR, AI-mediated EON XR, and self-mediated Matterport VR Tour) for nanofabrication cleanroom laboratory induction. The dataset contains knowledge test scores (pre, post, and delayed post-test), and self-reported confidence, satisfaction, enjoyment, cognitive load, and simulation-sickness ratings for 51 undergraduate participants. Includes a codebook and README.