Terahertz imagers based on metamaterial structures monolithically integrated in standard CMOS technologies Ivonne Escorcia*, James P. Grant*, Luis Gouveia^ and David R.S. Cumming* *University of Glasgow ^Universidad de Sevilla SPIE Defense + Commercial Sensing DOI The Dataset zip file contains all the data needed to replicate each one of the graphs shown in the paper. All the figures are in the folder named "Figures" Data from Figure 2a is in excel file named "Spectra and Refractive Indeces\Ref Ind_A" and the plot was created with Matlab file "createfigure_Refractive_Index_A" This file contains the refractive index of the broadband structure simulated using Lumerical software. Data from Figure 2b is in the excel file named "Spectral response at 2p5THz". This data was obtained from measuring the devices in a Bruker IFS 66v/S Fourier Transform Infrared Spectrometer. Data from Figure 4a is in the excel file named "Responsivity VS freq both sensors". Data from Figure 4b is in the excel file named "NEP both sensors". These data was obtained using a lock-in amplifier, mechanical chopper and 4 point probe source measure unit. Data from Figure 5b is in the excel file named "UoG_uncovered". Data from Figure 5d is in the excel file named "UoG_covered". These data was measured using Labview software using the THz detector and the image was formed using Matlab code "createfigure_UoG_covered and _uncovered". Data from Figure 6a is in excel file named "Spectra and Refractive Indeces\Ref Ind_F" and the plot was created with Matlab file "createfigure_Refractive_Index_F" This file contains the refractive index of the latest broadband structure simulated using Lumerical software. Data from Figure 6b is in excel file named "Spectra and Refractive Indeces\Abs Dist" and the plot was created with Matlab file "createfigure_Absorption_distribution" This file contains the power distribution simulated usinf Lumerical software. Data from Figure 6c is in the excel file named "Spectra and Refractive Indeces\SPIE". These data was obtained from measuring the devices in a Bruker IFS 66v/S Fourier Transform Infrared Spectrometer and simulations from Lumerical