High resolution structural characterisation of laser-induced defect clusters
inside diamond
Patrick S. Salter, Martin J. Booth, Arnaud Courvoisier, David A.J. Moran, and Donald A. MacLaren*

Appl. Phys. Lett. 111 (2017) 081103 http://dx.doi.org/10.1063/1.4993118 

E-mail for requests relating to the TEM data stored here: donald.maclaren@glasgow.ac.uk

Raw data TEM files are in Gatan's Digital Micrograph file format (details at the time of writing are advertised at: 
http://www.gatan.com/products/tem-analysis/gatan-microscopy-suite-software). 

Data was acquired using a JEOL ARMcFEG instrument operated at 200kV, using a Gatan Quantum electron spectrometer for EELS measurements (see manuscript for details). Spectrum imaging is performed by first collecting a dark field 'survey image' then acquiring data within a sub-region indicated within the survey image. For the datasets used here, two EELS spectra (low-loss and core loss) and dark field images from two detectors ('Gatan DF' and 'Gatan HAADF') are recorded; the file names generally indicate the nature of each subset of the data. Eight spectrum image data sets are included and data set 8 was used to compile Fig. 3 of the manuscript. Other datasets are provided to illustrate analyses of similar areas in the sample. A number of transmission electron microscopy (TEM) images are included and give an overview of the sample cross-section: these are files with the names 'Diamond_00xx.dm3'.

Note that metadata within the DM3 files may not be accurate, particularly user-inputted details of the sample and 'session info.' Conventional TEM images are generally collected using the 'TEM-S, spot-size 3' JEOL ARM configuration, with a 100 micron condenser aperture. STEM data is generally collected using a 40 micron condenser aperture with 'spot size 8' JEOL ARM configuration and a camera length of 20mm.

A summary pdf file outlining the individual data sets and with a brief commentary is also included. Dataset 8 was used to compile Fig. 3 of the manuscript and the images in Fig. 2 are immediately recognisable within the larger dataset stored here. 

Scanning electron microscopy (SEM) images collected during the preparation of the cross-sectional sample are also included in a sub-folder. These images were collected using the electron beam of the Dual-Beam FIB instrument cited in the manuscript.