Figure1_Tcdata.xlsx, Figure1_NormalizedResistancevsTempCurve.xlsx : Data for MoSi sputter growth optimization  

Figure2_ThoereticalModels.xlsx: Data for Variation of superconducting transition temperature with film thickness & comparison with theoretical models

Fig.4.xlsx: Data for investigating the composition of uncapped co-sputtered MoSi films via Electron Energy Loss Spectroscopy (EELS)

Fig.5.xlsx:Data for complex refractive index measurement for uncapped and capped MoSi films using variable angle spectroscopic ellipsometry 

Fig.6: Data for Transport measurement of nanowires patterned in a 10 nm thick MoSi thin film

Fig 7: Data for  Variation of transition temperature (T and superconducting energy gap  with nanowire width