This .zip file contains all of the data pertaining to the paper "Infrared Single-photon Sensitivity in Atomic Layer Deposited Superconducting Nanowires" published in Applied Physics Letters (2021). The data is organised as follows: A high resolution .tif file of the TEM image is included, as well as the live profile images used to determine the NbN and oxide thickness of the film. For the Resistance-Temperature curve presented the data is provided in RT_data.txt. The data used for the figure is calculated from column 'Voltage 2' with a bias current of 0.09 uA through the device. The temperature of interest is in column 'Cold Plate (k)' which was mounted beside the device. For the Pulse shape plot the data is included in Pulse_WaveformData.csv with the additional config data for the measurement given in Pulse_ConfigData.csv. For the photon response curves the data is provided in a separate file for each of the three wavelengths as well as another for the dark counts. These are given in DCR.txt, PCR_1310nm.txt, PCR_1550nm.txt and PCR_2006nm.txt. All of the files are of the same form giving the bias current supplied and the count rate. The timing jitter data is given in Jitter_histogram_data.csv. The original .sdt file (Jitter_data.sdt) output from the timing card (Becker and Hickl format) is also given which contains all configuration parameters for the measurement. See Becker and Hickl website for details.