Terahertz Metamaterial Absorbers Implemented in CMOS Technology for Imaging Applications: Scaling to Large Format Focal Plane Arrays
Ivonne Escorcia, James P. Grant, and David R.S. Cumming
University of Glasgow

IEEE Journal of Selected Topics in Quantum Electronics 
DOI 10.1109/JSTQE.2016.2630307

The Dataset zip file contains all the data needed to replicate each one of the graphs shown in the paper. 

All the figures are in the folder named "Figures"

Data from Figure 1c is in the excel file named "Single band metamaterial absorber"
Data from Figure 1d is in the excel file named "Broadband metamaterial absorber"
These data was obtained from measuring the devices in a Bruker IFS 66v/S Fourier Transform Infrared Spectrometer.

Data from Figure 2a and 2c is in the folder named "Lumerical FDTD Sims"
This file contains the power distribution simulated usinf Lumerical software.

Data from Figure 2b is in the excel file named "Spectral response at 2p5THz".
These data was obtained from measuring the devices in a Bruker IFS 66v/S Fourier Transform Infrared Spectrometer.

Data from Figure 4a is in the excel file named "VOx DC Responsivity".
Data from Figure 4b is in the excel file named "PN DC Responsivity".
Data from Figure 4c is in the excel file named "Responsivity VS freq VOx" and "Responsivity VS freq both sensors".
Data from Figure 4d is in the excel file named "Responsivity VS freq C7" and "Responsivity VS freq both sensors".
These data was obtained using a lock-in amplifier and 4 point probe source measure unit. 

Data from Figure 5c-d is in the folder VOx imaging.
Data from Figure 5e-f is in the folder Diode imaging. 
These data was measured using Labview software and the image was formed using Matlab code. 

Data from Figure 6 is in the excel file named "ChipF_experiment_and_simulation_absorption spectra".
These data was obtained from measuring the devices in a Bruker IFS 66v/S Fourier Transform Infrared Spectrometer.

Data from Figure 7c is in the folder named "Surface Profiler Images".
These data was obtained using a surface profiler tool. 

Data from Figure 7d is in the folder named "COMSOL sims".
These data was obtained using COMSOL software.

Data from Figure 9 is in the excel file named "Histogram".
These data was measured using Labview software and the image was formed using Excel.